How to create electrostatics models with wires, surfaces. Special formulations exist for electrostatic actuation, piezoelectrics, microfluidics, thin film damping, fsi, joule heating with thermal expansion, twophase flow and others. Use mems software to model piezoelectric devices, mems sensors, etc. Static analysis of electrostatically actuated micro. The proposed work is carried out by selecting the electrostatic physics domain in comsol multiphysics software. Electrostatic actuation makes use of electrostatic force induced by the potential difference between a microactuator and its electrode. Different designs and parameters such as the air gap, cantilever thickness and young modulus value depends on different material have been chosen for analysing the actuation voltage. The objective of this work is to study capacitance in electrostatic combdrive actuators. Built upon the core capabilities of comsol multiphysics, the mems module can be used to address virtually any. Without being experts in mathematical modeling, they have access. Finite element analysis, comsol software is used in multi physics environment.
Gausss law and faradays law can be seen as specifying conditions on the divergence and curl of the electric field, respectively. When compared to the widelyused electrostatic micro actuation, thermal actuation provides larger forces and is also easier to control 1. Can anyone help with the electrostatic actuation of a. A comparison of different structure designs and materials using comsol 3. Modeling microresonators with electrostatic actuation. How to model electromechanics in comsol multiphysics youtube. In addition to using multiphysics modeling for your own projects, you can also turn your models into simulation applications and digital twins for use by other design teams. We is readily available in the electrostatics application mode. An optimizationbased automated design tool using comsol multiphysics and genetic algorithms was developed for design of a mems sensor. When modeling such resonators, you will often come across terms such as equilibrium point. Comsol multiphysics software to create a simulation app that can be shared with colleagues at nrc and altec members. The metal processing module can be used for simulating metallurgical phase transformations, such as steel quenching, and the porous media flow module can be used to.
Learn how to model these types of systems in comsol multiphysics. The working of an electrostatic precipitators is discussed in chapter 2. Can anyone tell me the steps to apply the load and actuation voltage to the beam. This numerical approach separates the geometry into a grid of finite elements where the governing equations are.
The problems of electrostatic precipitators are discussed in chapter 5. Consequently, comsol multiphysics is ideally suited for mems applications. The air ionization by corona discharge is described by coupling poissons equation with the. Mems electrostatic parallel plate beam actuators can be comprehensive. The electrostatic properties of a nanocapillary can be analyzed using a finite element software, e.
Study of capacitance in electrostatic combdrive actuators. Electrostatic actuation thermal actuation there is a great demand for micro grippers or tweezers with a controlled grasping force and accuracy rajalakshmi engineering college, chennai 05. An automated design tool using comsol multiphysics 3. Two common actuation methods for mems resonators are piezoelectric actuation and electrostatic actuation. In the electrostatic physics domain, select terminals option to give voltage and ground to the movable comb fingers and fixed comb fingers. Started by grad student germund dahlquist based on code developed for a grad course at royal institute of technology in stockholm, sweden its earlier version was also called as femlab finite element method software provides simulation environment for real world applications.
Using the electrostatic potential, the fundamental equation for electrostatics in linear materials is. How i can simulation of magnetic field generated by ac current through multiturn coil and biasing with permanent magnet in comsol software. Using a local installation of the comsol server product figure 8, he can quickly deploy apps through a web interface, administer users, apply customized branding, and share updates when needed. The proposed work is carried out by selecting the electrostatic physics domain in comsolmultiphysics software, which is based on the finite element method fem. Micropump, mems, electrostatic actuation, pullin, multiphysics. The model solves the deformation of the beam under. Design of capacitance based on interdigitated electrode. In this blog post, we will discuss the modeling of electrostatically actuated mems resonators. Comsol multiphysics software been used to simulate the switch. Common physical fields we would encounter in most science and engineering applications. Literature survey research on mems tunable capacitors has mostly focused on electrothermal actuation mechanisms. Particular functionality may be common to several products. Static analysis using comsol multiphysics finite element package is done to validate the results. The switch simulated in this research was using electrostatic actuation method.
Engineers from manufacturing and sales can easily access highfidelity multiphysics simulation results through app libraries developed inhouse with their specific needs in mind. The modeling of the electric field of an electrostatic precipitator is the main part of this thesis report. Modeling of coronainduced electrohydrodynamic flow with. Electrostatic actuation is a common actuation method for microresonators. Use of comsol multiphysics for automated electrostatic mems sensor design. The task at this stage is the definition of a numerical design approach to optimize the device geometry and actuation, enabling a proper fluid transport. The device was comprised of a fixedfree polysilicon microcantilever beam with electrostatic actuation and capacitive sensing. Electrostatically actuated cantilever on comsol youtube. Electrostatically actuated cantilever comsol multiphysics. Basic mathematics for talking and doing multiphysics. Comsol multiphysics software is used for the simulation work. Static analysis of electrostatically actuated micro cantilever beam. Im trying to do the tutorial in comsol named electrostatic actuation of cantilever beam i have followed all the steps, and i checked all the model setting against the tutorial model to make.
Governing equations, boundary conditions, and numerical results obtained with comsol multiphysics are presented, and compared with experimental results. This stepbystep instructional video shows you how the electromechanics interface in comsol multiphysics couples and solves mechanical and. Section 4 describes the proposed work and methodology. To this end, the mems module provides predefined user interfaces with associated modeling tools, referred to as physics interfaces, for a variety of coupled physics, including electromagneticstructure, thermalstructure, or fluidstructure interactions. Comsol multiphysics software and the mems module are used to investigate and analyze the performance of the proposed micromirrors and. Comb fingers varied from 1 to 150 then respective capacitance values are obtained for the respective number of comb fingers. Design and modeling of an electrostatic ally actuated mems. This is intended to support future design process and prototype realization. Mems software for microelectromechanical systems simulation. In this model i make an accurate modeling for electrostatically actuated cantilever on comsol to study its behavior. As i am very new to comsol multiphysics, its very difficult for me to find the procedure for it. The figures below show another version of the mems capacitor model, where the dielectric material is replaced by an anisotropic piezoelectric material pzt5h.
Different parameters like beam displacement, electrostatics force and stress over. The model solves the deformation of the beam under an applied voltage. Using comsol multiphysics software to investigate advanced acoustic problems. As its applied voltage increases, higher electrostatic force results in.
How to apply load and actuation voltage to a beam in comsol. Modeling and simulation of an electrostatic precipitator. Pdf mechanical behavior simulation of memsbased cantilever. Comsol multiphysics an overview sciencedirect topics. Electrostatic actuation is one of the most common force generation schemes. Varactor performance parameters like tuning ratio cmaxcmin, quality factor. Built upon the core capabilities of comsol multiphysics, the mems module can be used to address almost all simulations in the microscale domain.
I solve the electric field electrohydrodynamic in one rectangular geometry with one emitter electrode in the center of rectangle and determined charge density and voltage for boundary. This chapter contains example models of mems actuators such as cantilever. A multiphysics 101 and a complete framework for multiphysics. Use of comsol multiphysics for automated electrostatic. Voltage is applied to movable comb fingers and ground is applied to fixed comb fingers. Comsol, comsol multiphysics, comsol script, comsol reaction. The electrostatic actuation mechanism for the electrostatic and. A multiphysics framework for the geometric optimization.
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